Invention Grant
- Patent Title: X-ray emission spectrometer system
-
Application No.: US16371606Application Date: 2019-04-01
-
Publication No.: US10578566B2Publication Date: 2020-03-03
- Inventor: Wenbing Yun , Srivatsan Seshadri , Sylvia Jia Yun Lewis , Janos Kirz
- Applicant: Sigray, Inc.
- Applicant Address: US CA Concord
- Assignee: Sigray, Inc.
- Current Assignee: Sigray, Inc.
- Current Assignee Address: US CA Concord
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: G01N23/223
- IPC: G01N23/223 ; G01N23/22 ; G01N23/2209 ; G01N23/2204

Abstract:
Systems and methods for x-ray emission spectroscopy are provided in which at least one x-ray analyzer is curved and receives and diffracts fluorescence x-rays emitted from a sample, and at least one spatially-resolving x-ray detector receives the diffracted x-rays. The at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on the Rowland circle. In some configurations, the fluorescence x-rays are emitted from the same surface of the sample that is irradiated by the x-rays from an x-ray source and the system has an off-Rowland circle geometry. In some other configurations, an x-ray optical train receives the fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and focuses at least some of the received fluorescence x-rays to a focal spot.
Public/Granted literature
- US20190302042A1 X-RAY EMISSION SPECTROMETER SYSTEM Public/Granted day:2019-10-03
Information query