公开(公告)号：US10304580B2

公开(公告)日：2019-05-28

申请号：US15954380

申请日：2018-04-16

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  David Vine ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Srivatsan Seshadri

IPC: G01N23/00 ,  G21K1/02 ,  G01N23/083 ,  G21K7/00

Abstract: Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

公开(公告)号：US20170336334A1

公开(公告)日：2017-11-23

申请号：US15663831

申请日：2017-07-31

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/207 ,  G01N23/087

CPC classification number: G01N23/2076 ,  G01N23/087 ,  G01N23/223 ,  G01N2223/04 ,  G01N2223/045 ,  G01N2223/0568 ,  G21K1/06 ,  G21K1/067 ,  G21K2201/064 ,  H01J35/08 ,  H01J35/14 ,  H01J35/18 ,  H01J2235/081 ,  H01J2235/086

Abstract: An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.

公开(公告)号：US20190302042A1

公开(公告)日：2019-10-03

申请号：US16371606

申请日：2019-04-01

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC: G01N23/2209 ,  G01N23/223

Abstract: Systems and methods for x-ray emission spectroscopy are provided in which at least one x-ray analyzer is curved and receives and diffracts fluorescence x-rays emitted from a sample, and at least one spatially-resolving x-ray detector receives the diffracted x-rays. The at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on the Rowland circle. In some configurations, the fluorescence x-rays are emitted from the same surface of the sample that is irradiated by the x-rays from an x-ray source and the system has an off-Rowland circle geometry. In some other configurations, an x-ray optical train receives the fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and focuses at least some of the received fluorescence x-rays to a focal spot.

公开(公告)号：US20190145917A1

公开(公告)日：2019-05-16

申请号：US16226467

申请日：2018-12-19

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/207 ,  G21K1/06 ,  H01J35/08 ,  H01J35/14 ,  H01J35/18 ,  G01N23/087 ,  G01N23/223

Abstract: An x-ray spectrometer system includes an x-ray source, an x-ray optical system, a mount, and an x-ray spectrometer. The x-ray optical system is configured to receive, focus, and spectrally filter x-rays from the x-ray source to form an x-ray beam having a spectrum that is attenuated in an energy range above a predetermined energy and having a focus at a predetermined focal plane.

公开(公告)号：US20170261442A1

公开(公告)日：2017-09-14

申请号：US15605957

申请日：2017-05-26

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Srivatsan Seshadri ,  Alan Francis Lyon ,  David Charles Reynolds

IPC: G01N23/04 ,  G21K1/06 ,  G21K7/00 ,  G01N23/20

CPC classification number: G01N23/04 ,  A61B6/4007 ,  A61B6/4291 ,  A61B6/484 ,  A61B6/508 ,  G01N23/20075 ,  G01N2223/3306 ,  G21K1/02 ,  G21K7/00 ,  G21K2207/005 ,  H01J35/08 ,  H01J2235/086 ,  H01J2235/1291

Abstract: This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.

公开(公告)号：US20210356412A1

公开(公告)日：2021-11-18

申请号：US17320852

申请日：2021-05-14

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Ruimin Qiao ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G01N23/085

Abstract: An apparatus includes a crystal analyzer positioned relative to an x-ray source on a Rowland circle in a tangential plane and having a Rowland circle radius (R). The crystal analyzer includes crystal planes curved along at least one direction within at least the tangential plane with a radius of curvature substantially equal to twice the Rowland circle radius (2R). The crystal planes are configured to receive x-rays from the x-ray source and to disperse the received x-rays according to Bragg's law. The apparatus further includes a spatially resolving detector configured to receive at least a portion of the dispersed x-rays. The spatially resolving detector includes a plurality of x-ray detection elements having a tunable first x-ray energy and/or a tunable second x-ray energy. The plurality of x-ray detection elements are configured to measure received dispersed x-rays having x-ray energies below the first x-ray energy while suppressing measurements of the received dispersed x-rays above the first x-ray energy and/or to measure the received dispersed x-rays having x-ray energies above the second x-ray energy while suppressing measurements of the received dispersed x-rays below the second x-ray energy. The first and second x-ray energies are tunable in a range of 1.5 keV to 30 keV.

公开(公告)号：US10578566B2

公开(公告)日：2020-03-03

申请号：US16371606

申请日：2019-04-01

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC: G01N23/223 ,  G01N23/22 ,  G01N23/2209 ,  G01N23/2204

Abstract: Systems and methods for x-ray emission spectroscopy are provided in which at least one x-ray analyzer is curved and receives and diffracts fluorescence x-rays emitted from a sample, and at least one spatially-resolving x-ray detector receives the diffracted x-rays. The at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on the Rowland circle. In some configurations, the fluorescence x-rays are emitted from the same surface of the sample that is irradiated by the x-rays from an x-ray source and the system has an off-Rowland circle geometry. In some other configurations, an x-ray optical train receives the fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and focuses at least some of the received fluorescence x-rays to a focal spot.

公开(公告)号：US20230349842A1

公开(公告)日：2023-11-02

申请号：US18309021

申请日：2023-04-28

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Ruimin Qiao ,  Sylvia Jia Yun Lewis ,  Srivatsan Seshadri ,  Janos Kirz ,  Benjamin Donald Stripe

IPC: G01N23/20008

CPC classification number: G01N23/20008 ,  G01N2223/316

Abstract: An apparatus is configured to receive x-rays propagating from an x-ray source. The apparatus includes first and second x-ray diffractors, the second x-ray diffractor downstream from the first x-ray diffractor and first and second x-ray detectors. The first x-ray diffractor is configured to receive the x-rays, to diffract a first spectral band of the x-rays to the first x-ray detector, and to transmit at least 2% of the received x-rays to the second x-ray diffractor. The second x-ray diffractor is configured to receive the transmitted x-rays from the first x-ray diffractor and to diffract a second spectral band of the x-rays to the second x-ray detector. The first x-ray detector is configured to measure a first spectrum of the first spectral band of the x-rays and the second x-ray detector is configured to measure a second spectrum of the second spectral band of the x-rays.

公开(公告)号：US20220082516A1

公开(公告)日：2022-03-17

申请号：US17533568

申请日：2021-11-23

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Ruimin Qiao ,  Janos Kirz ,  Sylvia Jia Yun Lewis

IPC: G01N23/223 ,  G01N23/085

Abstract: A fluorescence mode x-ray absorption spectroscopy apparatus includes an electron bombardment source of x-rays, a crystal analyzer, the source and the crystal analyzer defining a Rowland circle having a Rowland circle radius (R), a detector, and at least one stage configured to position a sample at a focal point of the Rowland circle with the detector facing the sample.

公开(公告)号：US10416099B2

公开(公告)日：2019-09-17

申请号：US15927520

申请日：2018-03-21

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Srivatsan Seshadri ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Alan Francis Lyon ,  Benjamin Donald Stripe

IPC: G01N23/00 ,  G01N23/085 ,  G21K1/06 ,  H01J35/02 ,  H01J35/10 ,  H01J35/12

Abstract: A method for performing x-ray absorption spectroscopy and an x-ray absorption spectrometer system to be used with a compact laboratory x-ray source to measure x-ray absorption of the element of interest in an object with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness laboratory x-ray source, an optical train to focus the x-rays through an object to be examined, and a spectrometer comprising a single crystal analyzer (and, in some embodiments, also a mosaic crystal) to disperse the transmitted beam onto a spatially resolving x-ray detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 105 mrad. and be coupled to an optical train that collects and focuses the high flux x-rays to spots less than 500 micrometers, leading to high flux density. The coatings of the optical train may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.