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1.发明公开公开(公告)号：US20230280291A1
公开(公告)日：2023-09-07
申请号：US18175171
申请日：2023-02-27
申请人： Sigray, Inc.
发明人： Wenbing Yun , Benjamin Donald Stripe , Frances Yenan Su , Vikaram Singh , Sylvia Jia Yun Lewis , Janos Kirz
IPC分类号： G01N23/223 , G01N23/2204
CPC分类号： G01N23/223 , G01N23/2204 , G01N2223/204 , G01N2223/206
摘要： A system includes a stage for supporting a sample having at least first and second atomic elements. The first atomic element has a first characteristic x-ray line with a first energy and the second atomic element has a second characteristic x-ray line with a second energy, the first and second energies lower than 8 keV and separated from one another by less than 1 keV. The system further includes an x-ray source of x-rays having a third energy between the first and second energies and at least one x-ray optic configured to receive and focus at least some of the x-rays as an x-ray beam to illuminate the sample. The system further includes at least one x-ray detector configured to detect fluorescence x-rays produced by the sample in response to being irradiated by the x-ray beam.
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公开(公告)号：US11549895B2
公开(公告)日：2023-01-10
申请号：US17476355
申请日：2021-09-15
申请人： Sigray, Inc.
IPC分类号： G01N23/20 , G01N23/223 , G01N23/2273 , G01N23/2206
摘要： A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.
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公开(公告)号：US11056308B2
公开(公告)日：2021-07-06
申请号：US16560287
申请日：2019-09-04
申请人： Sigray, Inc.
发明人： Wenbing Yun , Janos Kirz
IPC分类号： H01J35/10 , H01J35/06 , H01J35/14 , G01N23/083 , H01J35/18 , G01N23/2273
摘要： A system for x-ray analysis includes at least one x-ray source configured to emit x-rays. The at least one x-ray source includes at least one silicon carbide sub-source on or embedded in at least one thermally conductive substrate and configured to generate the x-rays in response to electron bombardment of the at least one silicon carbide sub-source. At least some of the x-rays emitted from the at least one x-ray source includes Si x-ray emission line x-rays. The system further includes at least one x-ray optical train configured to receive the Si x-ray emission line x-rays and to irradiate a sample with at least some of the Si x-ray emission line x-rays.
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公开(公告)号：US10653376B2
公开(公告)日：2020-05-19
申请号：US16402887
申请日：2019-05-03
申请人： Sigray, Inc.
IPC分类号： A61B6/00 , A61B6/03 , H01J35/08 , H01J35/12 , G01N23/046 , G01N23/041 , A61B6/04
摘要： An x-ray imaging system includes an x-ray source, a beam-splitting grating having a plurality of structures arranged in a two-dimensional periodic array, a stage configured to hold an object to be imaged, and an x-ray detector having a two-dimensional array of x-ray detecting elements and positioned to detect x-rays diffracted by the beam-splitting grating and perturbed by the object to be imaged.
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公开(公告)号：US10304580B2
公开(公告)日：2019-05-28
申请号：US15954380
申请日：2018-04-16
申请人： Sigray, Inc.
IPC分类号： G01N23/00 , G21K1/02 , G01N23/083 , G21K7/00
摘要： Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.
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公开(公告)号：US20190088438A9
公开(公告)日：2019-03-21
申请号：US15783855
申请日：2017-10-13
申请人： Sigray, Inc.
摘要： An x-ray illumination beam system includes an electron emitter and a target having one or more target microstructures. The one or more microstructures may be the same or different material, and may be embedded or placed atop a substrate formed of a heat-conducting material. The x-ray source may emit x-rays towards an optic system, which can include one or more optics that are matched to one or more target microstructures. The matching can be achieved by selecting optics with the geometric shape, size, and surface coating that collects as many x-rays as possible from the source and at an angle that satisfies the critical reflection angle of the x-ray energies of interest from the target. The x-ray illumination beam system allows for an x-ray source that generates x-rays having different spectra and can be used in a variety of applications.
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公开(公告)号：US20170336334A1
公开(公告)日：2017-11-23
申请号：US15663831
申请日：2017-07-31
申请人： Sigray, Inc.
IPC分类号： G01N23/207 , G01N23/087
CPC分类号： G01N23/2076 , G01N23/087 , G01N23/223 , G01N2223/04 , G01N2223/045 , G01N2223/0568 , G21K1/06 , G21K1/067 , G21K2201/064 , H01J35/08 , H01J35/14 , H01J35/18 , H01J2235/081 , H01J2235/086
摘要： An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.
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公开(公告)号：US09719947B2
公开(公告)日：2017-08-01
申请号：US14700137
申请日：2015-04-29
申请人： Sigray, Inc.
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
CPC分类号： G01N23/20075 , A61B6/4007 , A61B6/4291 , A61B6/484 , A61B6/508 , G21K1/02 , G21K2207/005 , H01J35/08 , H01J2235/086 , H01J2235/087
摘要： An x-ray interferometric imaging system in which the x-ray source comprises a target having a plurality of structured coherent sub-sources of x-rays embedded in a thermally conducting substrate. The system additionally comprises a beam-splitting grating G1 that establishes a Talbot interference pattern, which may be a π phase-shifting grating, and an x-ray detector to convert two-dimensional x-ray intensities into electronic signals. The system may also comprise a second analyzer grating G2 that may be placed in front of the detector to form additional interference fringes, a means to translate the second grating G2 relative to the detector. The system may additionally comprise an antiscattering grid to reduce signals from scattered x-rays. Various configurations of dark-field and bright-field detectors are also disclosed.
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公开(公告)号：US20160064175A1
公开(公告)日：2016-03-03
申请号：US14784029
申请日：2014-08-29
申请人： SINGRAY, INC
发明人： Wenbing YUN , Janos KIRZ , Sylvia Jia Yun LEWIS
CPC分类号： H01J35/12 , G03F7/16 , G03F7/36 , H01J35/105 , H01J2235/081 , H01J2235/1204
摘要： Disclosed are targets for generating x-rays using electron beams and their method of fabrication. They comprise a number of microstructures fabricated from an x-ray target material arranged in close thermal contact with a substrate such that the heat is more efficiently drawn out of the x-ray target material. This allows irradiation of the x-ray generating substance with higher electron density or higher energy electrons, leading to greater x-ray brightness, without inducing damage or melting. The microstructures may comprise conventional x-ray target materials (such as tungsten) that are patterned at micron-scale dimensions on a thermally conducting substrate, such as diamond. The microstructures may have any number of geometric shapes to best generate x-rays of high brightness and efficiently disperse heat. In some embodiments, the target comprising microstructures may be incorporated into a rotating anode geometry, to enhance x-ray generation in such systems.
摘要翻译： 公开了使用电子束产生X射线的目标及其制造方法。 它们包括由x射线靶材料制成的多个微结构，该X射线靶材料与衬底紧密地热接触地布置，使得热量更有效地从x射线靶材料中拉出。 这允许以更高的电子密度或更高能量的电子照射x射线产生物质，导致更大的x射线亮度，而不引起损伤或熔化。 微结构可以包括在诸如金刚石的导热基底上以微米级尺寸图案化的常规x射线靶材料（例如钨）。 微结构可以具有任何数量的几何形状，以最好地产生高亮度的x射线并有效地分散热量。 在一些实施例中，包括微结构的靶可以并入到旋转阳极几何中，以增强这种系统中的x射线产生。
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公开(公告)号：US20230218247A1
公开(公告)日：2023-07-13
申请号：US18152973
申请日：2023-01-11
申请人： Sigray, Inc.
发明人： Wenbing Yun , Janos Kirz
IPC分类号： A61B6/00
摘要： An x-ray source includes at least one housing configured to contain a first region at a pressure less than one atmosphere and configured to separate the first region from an ambient environment outside the at least one housing. The at least one housing includes an x-ray transmissive window having an x-ray transmittance greater than or equal to 20% for at least some x-rays having an x-ray energy less than 1 keV. The x-ray source further includes an electron source within the at least one housing. The electron source is configured to generate at least one electron beam. The x-ray source further includes an anode assembly within the at least one housing and configured to generate x-rays in response to electron bombardment by at least some of the electrons of the at least one electron beam from the electron source. The x-ray source further includes at least one x-ray optic within the at least one housing. The at least one x-ray optic is configured to receive at least some of the x-rays from the anode assembly and to direct at least some of the received x-rays to the window to form an x-ray beam.
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