Invention Grant
- Patent Title: Hybrid BEOL metallization utilizing selective reflection mask
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Application No.: US16039570Application Date: 2018-07-19
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Publication No.: US10586767B2Publication Date: 2020-03-10
- Inventor: Benjamin D. Briggs , Cornelius Brown Peethala , Michael Rizzolo , Koichi Motoyama , Gen Tsutsui , Ruqiang Bao , Gangadhara Raja Muthinti , Lawrence A. Clevenger
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Donna Flores
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/02 ; H01L21/48 ; H01L21/768 ; H01L21/306

Abstract:
A method for fabricating semiconductor wafers comprises creating a semiconductor wafer having a plurality of wide copper wires and a plurality of narrow copper wires embedded in a dielectric insulator. The width of each wide copper wire is greater than a cutoff value and each narrow copper is less than the cutoff value. An optical pass through layer is deposited over a top surface of the wafer and a photo-resist layer is deposited over the optical pass through layer. The wafer is exposed to a light source to selectively remove photo-resist, forming a self-aligned pattern where photo-resist only remains in areas above wide copper wires. The self-aligned pattern is transferred to the optical pass through layer and the remaining photo-resist is removed. The wafer is chemically etched to remove the narrow copper wires, defining narrow gaps in the dielectric insulator. The wafer is metallized with non-copper metal, forming narrow non-copper metal wires.
Public/Granted literature
- US20200027840A1 HYBRID BEOL METALLIZATION UTILIZING SELECTIVE REFLECTION MASK Public/Granted day:2020-01-23
Information query
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