Invention Grant
- Patent Title: System and method for edge termination of super-junction (SJ) devices
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Application No.: US16010531Application Date: 2018-06-18
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Publication No.: US10586846B2Publication Date: 2020-03-10
- Inventor: Alexander Viktorovich Bolotnikov , Reza Ghandi , David Alan Lilienfeld , Peter Almern Losee
- Applicant: General Electric Company
- Applicant Address: US NY Niskayuna
- Assignee: GENERAL ELECTRIC COMPANY
- Current Assignee: GENERAL ELECTRIC COMPANY
- Current Assignee Address: US NY Niskayuna
- Agency: Fletcher Yoder, P.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/16 ; H01L21/04 ; H01L21/265 ; H01L29/20 ; H01L21/266 ; H01L29/78

Abstract:
The subject matter disclosed herein relates to super-junction (SJ) power devices and, more specifically, to edge termination techniques for SJ power devices. A semiconductor super-junction (SJ) device includes one or more epitaxial (epi) layers having a termination region disposed adjacent to an active region. The termination region includes a plurality of vertical pillars of a first and a second conductivity-type, wherein, moving outward from the active region, a respective width of each successive vertical pillar is the same or smaller. The termination region also includes a plurality of compensated regions having a low doping concentration disposed directly between a first side of each vertical pillar of the first conductivity-type and a first side of each vertical pillar of the second conductivity-type, wherein, moving outward from the active region, a respective width of each successive compensated region is the same or greater.
Public/Granted literature
- US20190140048A1 SYSTEM AND METHOD FOR EDGE TERMINATION OF SUPER-JUNCTION (SJ) DEVICES Public/Granted day:2019-05-09
Information query
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