Invention Grant
- Patent Title: Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus
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Application No.: US16530468Application Date: 2019-08-02
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Publication No.: US10600618B2Publication Date: 2020-03-24
- Inventor: Ogsen Galstyan , Young-Bin Kim , Jamyung Gu , Jong-Hwan An
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0091736 20180807; KR10-2019-0035804 20190328
- Main IPC: H05B33/00
- IPC: H05B33/00 ; H01J37/32 ; H05H1/00 ; H05H1/48

Abstract:
A substrate treating apparatus includes a chamber having a space therein in which a substrate is treated, a support unit that supports the substrate in the chamber, a gas supply unit that supplies gas into the chamber, and a plasma generation unit that excites the gas in the chamber into a plasma state. The plasma generation unit includes a high-frequency power supply, a first antenna connected to one end of the high-frequency power supply, a second antenna connected with the first antenna in parallel, and a current divider that distributes electric current to the first antenna and the second antenna. The current divider includes a first capacitor disposed between the first antenna and the second antenna, a second capacitor connected with the second antenna in parallel, and a third capacitor connected with the second antenna in series. The second capacitor and the third capacitor are implemented with a variable capacitor.
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