Invention Grant
- Patent Title: Channel strain formation in vertical transport FETS with dummy stressor materials
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Application No.: US15986622Application Date: 2018-05-22
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Publication No.: US10600695B2Publication Date: 2020-03-24
- Inventor: Choonghyun Lee , Kangguo Cheng , Shogo Mochizuki , Juntao Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8238 ; H01L29/78 ; H01L27/092 ; H01L29/66 ; H01L29/51 ; H01L21/8234 ; H01L21/02

Abstract:
Techniques for forming VTFET devices with tensile- and compressively-strained channels using dummy stressor materials are provided. In one aspect, a method of forming a VTFET device includes: patterning fins in a wafer; forming bottom source and drains at a base of the fins; forming bottom spacers on the bottom source and drains; growing at least one dummy stressor material along sidewalls of the fins above the bottom spacers configured to induce strain in the fins; surrounding the fins with a rigid fill material; removing the at least one dummy stressor material to form gate trenches in the rigid fill material while maintaining the strain in the fins by the rigid fill material; forming replacement gate stacks in the gate trenches; forming top spacers on the replacement gate stacks; and forming top source and drains over the top spacers at tops of the fins. A VTFET device is also provided.
Public/Granted literature
- US20190363026A1 Channel Strain Formation in Vertical Transport FETS with Dummy Stressor Materials Public/Granted day:2019-11-28
Information query
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