Invention Grant
- Patent Title: Apparatus for inspection of a package assembly with a thermal solution
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Application No.: US15685772Application Date: 2017-08-24
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Publication No.: US10600699B2Publication Date: 2020-03-24
- Inventor: Aastha Uppal , Je-Young Chang , Shankar Devasenathipathy , Joseph B. Petrini
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01K7/22 ; H01L23/498 ; G01K1/02 ; G01K1/14 ; H01L23/427

Abstract:
Embodiments of the present disclosure provide techniques and configurations for inspection of a package assembly with a thermal solution, in accordance with some embodiments. In embodiments, an apparatus for inspection of a package assembly with a thermal solution may include a first fixture to house the package assembly on the apparatus, and a second fixture to house at least a portion of a thermal solution that is to be disposed on top of the package assembly. The apparatus may further include a load actuator, to apply a load to a die of the package assembly, via the thermal solution, and a plurality of sensors disposed around the thermal solution and the package assembly, to perform in situ thermal and/or mechanical measurements associated with the application of the load to the die of the package assembly. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20190067135A1 APPARATUS FOR INSPECTION OF A PACKAGE ASSEMBLY WITH A THERMAL SOLUTION Public/Granted day:2019-02-28
Information query
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