Invention Grant
- Patent Title: Test element group and semiconductor wafer including the same
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Application No.: US16148424Application Date: 2018-10-01
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Publication No.: US10600702B2Publication Date: 2020-03-24
- Inventor: Zhan Zhan , Ju Hyun Kim , Sung Gun Kang , Hwa Sung Rhee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0036600 20180329
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/66 ; H01L27/092 ; G01R31/28 ; H01L29/08

Abstract:
A test element group includes a test element including a plurality of test transistors connected in series between a first node and a second node, the second node being connected to a ground node; a first transistor connected between the first node and a power supply node; and a second transistor configured to generate an output current, proportional to a voltage at the first node, and connected to the first node and the power supply node.
Public/Granted literature
- US20190304856A1 TEST ELEMENT GROUP AND SEMICONDUCTOR WAFER INCLUDING THE SAME Public/Granted day:2019-10-03
Information query
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