Invention Grant
- Patent Title: Field-effect transistors including multiple gate lengths
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Application No.: US15994402Application Date: 2018-05-31
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Publication No.: US10608082B2Publication Date: 2020-03-31
- Inventor: Julien Frougier , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/423 ; H01L21/8234 ; H01L29/10 ; H01L29/08

Abstract:
Structures for a field-effect transistor and methods of forming structures for a field-effect transistor. A semiconductor fin having a channel region, a nanowire arranged over the channel region of the semiconductor fin, a source/drain region connected with the channel region of the semiconductor fin and the nanowire, and a gate structure that overlaps with the channel region of the semiconductor fin and the nanowire. The nanowire has a first gate length, and the channel region of the semiconductor fin has a second gate length that is greater than the first gate length.
Information query
IPC分类: