Invention Grant
- Patent Title: Methods of manufacture for MEMS switches with reduced switching voltage
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Application No.: US15717187Application Date: 2017-09-27
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Publication No.: US10647569B2Publication Date: 2020-05-12
- Inventor: Stephen E. Luce , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01H49/00 ; H01H11/00 ; H01H59/00 ; H01H1/00 ; H01H1/58 ; H01H50/00

Abstract:
An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode operable to directly contact the first cantilevered electrode upon an application of a voltage to a second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
Public/Granted literature
- US20180016137A1 MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE Public/Granted day:2018-01-18
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