Invention Grant
- Patent Title: Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
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Application No.: US15597098Application Date: 2017-05-16
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Publication No.: US10649447B2Publication Date: 2020-05-12
- Inventor: Pavel Izikson , John Robinson , Mike Adel , Amir Widmann , Dongsub Choi , Anat Marchelli
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA San Jose
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA San Jose
- Agent Ann Marie Mewherter
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G06F19/00 ; G05B21/02 ; H01L21/67 ; G03F7/20
Abstract:
Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on wafers includes performing the measurements on all of the wafers in at least one lot at all measurement spots on the wafers. The method also includes determining an optimal sampling scheme, an enhanced sampling scheme, a reduced sampling scheme, and thresholds for the dynamic sampling scheme for the process based on results of the measurements. The thresholds correspond to values of the measurements at which the optimal sampling scheme, the enhanced sampling scheme, and the reduced sampling scheme are to be used for the process.
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