Invention Grant
- Patent Title: Apparatus and method of three dimensional conductive lines
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Application No.: US16224159Application Date: 2018-12-18
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Publication No.: US10651114B2Publication Date: 2020-05-12
- Inventor: Chih-Yu Lin , Kao-Cheng Lin , Li-Wen Wang , Yen-Huei Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L25/065 ; H01L27/06 ; G11C5/06 ; G11C7/18 ; H01L27/10

Abstract:
An apparatus and method of three dimensional conductive lines comprising a first memory column segment in a first tier, a second memory column segment in a second tier, and conductive lines connecting the first memory column segment to the second memory column segment. In some embodiments a conductive line is disposed in the first tier on a first side of the memory column and in the second tier on a second side of the memory column.
Public/Granted literature
- US20190122960A1 APPARATUS AND METHOD OF THREE DIMENSIONAL CONDUCTIVE LINES Public/Granted day:2019-04-25
Information query
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