Invention Grant
- Patent Title: Shadowed grid structures for electrodes in vacuum electronics
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Application No.: US16041639Application Date: 2018-07-20
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Publication No.: US10658144B2Publication Date: 2020-05-19
- Inventor: Stephen E. Clark , Chloe A. M. Fabien , Gary D. Foley , Arvind Kannan , Andrew T. Koch , Andrew R. Lingley , Hsin-I Lu , Max N. Mankin , Tony S. Pan , Jason M. Parker , Peter J. Scherpelz , Yong Sun , Chuteng Zhou
- Applicant: Modern Electron, LLC
- Applicant Address: US WA Bellevue
- Assignee: Modern Electron, LLC
- Current Assignee: Modern Electron, LLC
- Current Assignee Address: US WA Bellevue
- Agency: Robert R. Richardson, P.S.
- Main IPC: H01J19/42
- IPC: H01J19/42 ; H01J1/46 ; H01J19/02 ; H01L29/43

Abstract:
Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.
Public/Granted literature
- US20190043685A1 Shadowed Grid Structures For Electrodes In Vacuum Electronics Public/Granted day:2019-02-07
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