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公开(公告)号：US10811212B2
公开(公告)日：2020-10-20
申请号：US16539943
申请日：2019-08-13
Applicant: Modern Electron, LLC
Inventor： Max N. Mankin , Chloe A. M. Fabien , Gary D. Foley , Andrew T. Koch , William Kokonaski , Andrew R. Lingley , Tony S. Pan , Yong Sun
Abstract: Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.
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公开(公告)号：US11120977B2
公开(公告)日：2021-09-14
申请号：US15800912
申请日：2017-11-01
Applicant: Modern Electron, LLC
Inventor： Chloe A. M. Fabien , Max N. Mankin , Tony S. Pan , Yong Sun
Abstract: Disclosed embodiments include conductive oxide-coated electrodes and methods of fabricating a conductive oxide-coated electrode. In a non-limiting embodiment, a conductive oxide-coated electrode includes: a conductive layer; and an oxide coating disposed on the conductive layer. In another non-limiting embodiment, a method of fabricating a conductive oxide-coated electrode includes: patterning a conductive layer; etching the patterned conductive layer; and disposing an oxide coating on the etched conductive layer.
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公开(公告)号：US20200075286A1
公开(公告)日：2020-03-05
申请号：US16539943
申请日：2019-08-13
Applicant: Modern Electron, LLC
Inventor： Max N. Mankin , Chloe A. M. Fabien , Gary D. Foley , Andrew T. Koch , William Kokonaski , Andrew R. Lingley , Tony S. Pan , Yong Sun
Abstract: Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.
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公开(公告)号：US20190341216A1
公开(公告)日：2019-11-07
申请号：US16514361
申请日：2019-07-17
Applicant: Modern Electron, LLC
Inventor： Yong Sun , Andrew T. Koch , Andrew R. Lingley , Chloe A. M. Fabien , Max N. Mankin , Tony S. Pan
Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a first film layer disposed on the electrode about a periphery of the electrode; and a second film layer disposed on the first film layer, the second film layer including a plurality of electrically conductive grid lines patterned therein that are supported only at the periphery of the electrode by the first film layer.
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公开(公告)号：US10424455B2
公开(公告)日：2019-09-24
申请号：US16041643
申请日：2018-07-20
Applicant: Modern Electron, LLC
Inventor： Yong Sun , Andrew T. Koch , Andrew R. Lingley , Chloe A. M. Fabien , Max N. Mankin , Tony S. Pan
Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a first film layer disposed on the electrode about a periphery of the electrode; and a second film layer disposed on the first film layer, the second film layer including a plurality of electrically conductive grid lines patterned therein that are supported only at the periphery of the electrode by the first film layer.
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Patent Agency Ranking
公开(公告)号：US10658144B2
公开(公告)日：2020-05-19
申请号：US16041639
申请日：2018-07-20
Applicant: Modern Electron, LLC
Inventor： Stephen E. Clark , Chloe A. M. Fabien , Gary D. Foley , Arvind Kannan , Andrew T. Koch , Andrew R. Lingley , Hsin-I Lu , Max N. Mankin , Tony S. Pan , Jason M. Parker , Peter J. Scherpelz , Yong Sun , Chuteng Zhou
Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.
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公开(公告)号：US20190043685A1
公开(公告)日：2019-02-07
申请号：US16041639
申请日：2018-07-20
Applicant: Modern Electron, LLC
Inventor： Stephen E. Clark , Chloe A. M. Fabien , Gary D. Foley , Arvind Kannan , Andrew T. Koch , Andrew R. Lingley , Hsin-I Lu , Max N. Mankin , Tony S. Pan , Jason M. Parker , Peter J. Scherpelz , Yong Sun , Chuteng Zhou
Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.
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公开(公告)号：US20190027334A1
公开(公告)日：2019-01-24
申请号：US16041643
申请日：2018-07-20
Applicant: Modern Electron, LLC
Inventor： Yong Sun , Andrew T. Koch , Andrew R. Lingley , Chloe A. M. Fabien , Max N. Mankin , Tony S. Pan
Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a first film layer disposed on the electrode about a periphery of the electrode; and a second film layer disposed on the first film layer, the second film layer including a plurality of electrically conductive grid lines patterned therein that are supported only at the periphery of the electrode by the first film layer.
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公开(公告)号：US10720297B2
公开(公告)日：2020-07-21
申请号：US16514361
申请日：2019-07-17
Applicant: Modern Electron, LLC
Inventor： Yong Sun , Andrew T. Koch , Andrew R. Lingley , Chloe A. M. Fabien , Max N. Mankin , Tony S. Pan
Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a first film layer disposed on the electrode about a periphery of the electrode; and a second film layer disposed on the first film layer, the second film layer including a plurality of electrically conductive grid lines patterned therein that are supported only at the periphery of the electrode by the first film layer.
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公开(公告)号：US20180144915A1
公开(公告)日：2018-05-24
申请号：US15800912
申请日：2017-11-01
Applicant: Modern Electron, LLC
Inventor： Chloe A. M. Fabien , Max N. Mankin , Tony S. Pan , Yong Sun
IPC: H01J45/00 , C23C16/455 , B05D1/02 , B05D1/00 , C23C14/22
CPC classification number: H01J45/00 , B05D1/005 , B05D1/02 , C23C14/221 , C23C16/45525
Abstract: Disclosed embodiments include conductive oxide-coated electrodes and methods of fabricating a conductive oxide-coated electrode. In a non-limiting embodiment, a conductive oxide-coated electrode includes: a conductive layer; and an oxide coating disposed on the conductive layer. In another non-limiting embodiment, a method of fabricating a conductive oxide-coated electrode includes: patterning a conductive layer; etching the patterned conductive layer; and disposing an oxide coating on the etched conductive layer.
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