公开(公告)号：US20200075286A1

公开(公告)日：2020-03-05

申请号：US16539943

申请日：2019-08-13

Applicant: Modern Electron, LLC

Inventor： Max N. Mankin ,  Chloe A. M. Fabien ,  Gary D. Foley ,  Andrew T. Koch ,  William Kokonaski ,  Andrew R. Lingley ,  Tony S. Pan ,  Yong Sun

IPC: H01J19/44 ,  H01J19/38 ,  H01J9/18

Abstract: Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.

公开(公告)号：US10811212B2

公开(公告)日：2020-10-20

申请号：US16539943

申请日：2019-08-13

Applicant: Modern Electron, LLC

Inventor： Max N. Mankin ,  Chloe A. M. Fabien ,  Gary D. Foley ,  Andrew T. Koch ,  William Kokonaski ,  Andrew R. Lingley ,  Tony S. Pan ,  Yong Sun

IPC: H01J19/44 ,  H01J9/18 ,  H01J19/38

Abstract: Disclosed embodiments include vacuum electronic devices and methods of fabricating a vacuum electronic device. In a non-limiting embodiment, a vacuum electronic device includes an electrode that defines discrete support structures therein. A first film layer is disposed on the electrode about a periphery of the electrode and on the support structures. A second film layer is disposed on the first film layer. The second film layer includes electrically conductive grid lines patterned therein that are supported by and suspended between the support structures.

公开(公告)号：US10658144B2

公开(公告)日：2020-05-19

申请号：US16041639

申请日：2018-07-20

Applicant: Modern Electron, LLC

Inventor： Stephen E. Clark ,  Chloe A. M. Fabien ,  Gary D. Foley ,  Arvind Kannan ,  Andrew T. Koch ,  Andrew R. Lingley ,  Hsin-I Lu ,  Max N. Mankin ,  Tony S. Pan ,  Jason M. Parker ,  Peter J. Scherpelz ,  Yong Sun ,  Chuteng Zhou

IPC: H01J19/42 ,  H01J1/46 ,  H01J19/02 ,  H01L29/43

Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.

公开(公告)号：US20190043685A1

公开(公告)日：2019-02-07

申请号：US16041639

申请日：2018-07-20

Applicant: Modern Electron, LLC

Inventor： Stephen E. Clark ,  Chloe A. M. Fabien ,  Gary D. Foley ,  Arvind Kannan ,  Andrew T. Koch ,  Andrew R. Lingley ,  Hsin-I Lu ,  Max N. Mankin ,  Tony S. Pan ,  Jason M. Parker ,  Peter J. Scherpelz ,  Yong Sun ,  Chuteng Zhou

IPC: H01J19/42 ,  H01J19/02 ,  H01L29/43

Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.