公开(公告)号：US10658144B2

公开(公告)日：2020-05-19

申请号：US16041639

申请日：2018-07-20

Applicant: Modern Electron, LLC

Inventor： Stephen E. Clark ,  Chloe A. M. Fabien ,  Gary D. Foley ,  Arvind Kannan ,  Andrew T. Koch ,  Andrew R. Lingley ,  Hsin-I Lu ,  Max N. Mankin ,  Tony S. Pan ,  Jason M. Parker ,  Peter J. Scherpelz ,  Yong Sun ,  Chuteng Zhou

IPC: H01J19/42 ,  H01J1/46 ,  H01J19/02 ,  H01L29/43

Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.

公开(公告)号：US20190043685A1

公开(公告)日：2019-02-07

申请号：US16041639

申请日：2018-07-20

Applicant: Modern Electron, LLC

Inventor： Stephen E. Clark ,  Chloe A. M. Fabien ,  Gary D. Foley ,  Arvind Kannan ,  Andrew T. Koch ,  Andrew R. Lingley ,  Hsin-I Lu ,  Max N. Mankin ,  Tony S. Pan ,  Jason M. Parker ,  Peter J. Scherpelz ,  Yong Sun ,  Chuteng Zhou

IPC: H01J19/42 ,  H01J19/02 ,  H01L29/43

Abstract: Disclosed embodiments include vacuum electronics devices and methods of fabricating a vacuum electronics device. In a non-limiting embodiment, a vacuum electronics device includes: an electrode; a plurality of grid supports disposed on the electrode, each of the plurality of grid supports having a first width; and a plurality of grid lines, each of the plurality of grid lines being supported on an associated one of the plurality of grid supports, each of the plurality of grid lines having a second width that is wider than the first width.