- 专利标题: RRAM devices and their methods of fabrication
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申请号: US16099173申请日: 2016-07-02
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公开(公告)号: US10658586B2公开(公告)日: 2020-05-19
- 发明人: James S. Clarke , Ravi Pillarisetty , Uday Shah , Tejaswi K. Indukuri , Niloy Mukherjee , Elijah V. Karpov , Prashant Majhi
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 国际申请: PCT/US2016/040889 WO 20160702
- 国际公布: WO2018/009156 WO 20180111
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L27/24 ; G11C13/00
摘要:
Embodiments of the present invention include RRAM devices and their methods of fabrication. In an embodiment, a resistive random access memory (RRAM) cell includes a conductive interconnect disposed in a dielectric layer above a substrate. An RRAM device is coupled to the conductive interconnect. An RRAM memory includes a bottom electrode disposed above the conductive interconnect and on a portion of the dielectric layer. A conductive layer is formed on the bottom electrode layer. The conductive layer is separate and distinct from the bottom electrode layer. The conductive layer further includes a material that is different from the bottom electrode layer. A switching layer is formed on the conductive layer. An oxygen exchange layer is formed on the switching layer and a top electrode is formed on the oxygen exchange layer.
公开/授权文献
- US20190214559A1 RRAM DEVICES AND THEIR METHODS OF FABRICATION 公开/授权日:2019-07-11
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