Invention Grant
- Patent Title: RRAM devices and their methods of fabrication
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Application No.: US16099173Application Date: 2016-07-02
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Publication No.: US10658586B2Publication Date: 2020-05-19
- Inventor: James S. Clarke , Ravi Pillarisetty , Uday Shah , Tejaswi K. Indukuri , Niloy Mukherjee , Elijah V. Karpov , Prashant Majhi
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/040889 WO 20160702
- International Announcement: WO2018/009156 WO 20180111
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; G11C13/00

Abstract:
Embodiments of the present invention include RRAM devices and their methods of fabrication. In an embodiment, a resistive random access memory (RRAM) cell includes a conductive interconnect disposed in a dielectric layer above a substrate. An RRAM device is coupled to the conductive interconnect. An RRAM memory includes a bottom electrode disposed above the conductive interconnect and on a portion of the dielectric layer. A conductive layer is formed on the bottom electrode layer. The conductive layer is separate and distinct from the bottom electrode layer. The conductive layer further includes a material that is different from the bottom electrode layer. A switching layer is formed on the conductive layer. An oxygen exchange layer is formed on the switching layer and a top electrode is formed on the oxygen exchange layer.
Public/Granted literature
- US20190214559A1 RRAM DEVICES AND THEIR METHODS OF FABRICATION Public/Granted day:2019-07-11
Information query
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