- 专利标题: 3D packages and methods for forming the same
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申请号: US16362012申请日: 2019-03-22
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公开(公告)号: US10665474B2公开(公告)日: 2020-05-26
- 发明人: Tzu-Wei Chiu , Cheng-Hsien Hsieh , Hsien-Pin Hu , Kuo-Ching Hsu , Shang-Yun Hou , Shin-Puu Jeng
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H01L23/498 ; H01L21/683 ; H01L21/56
摘要:
Embodiments of the present disclosure include a semiconductor device and methods of forming a semiconductor device. An embodiment is a semiconductor device comprising an interconnecting structure consisting of a plurality of thin film layers and a plurality of metal layers disposed therein, each of the plurality of metal layers having substantially a same top surface area, and a die comprising an active surface and a backside surface opposite the active surface, the active surface being directly coupled to a first side of the interconnecting structure. The semiconductor device further comprises a first connector directly coupled to a second side of the interconnecting structure, the second side being opposite the first side.
公开/授权文献
- US20190221445A1 3D Packages and Methods for Forming the Same 公开/授权日:2019-07-18
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