Invention Grant
- Patent Title: Electromagnetic shield for testing integrated circuits
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Application No.: US15838550Application Date: 2017-12-12
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Publication No.: US10677816B2Publication Date: 2020-06-09
- Inventor: Alberto Pagani
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@15a2eb75
- Main IPC: G01R1/18
- IPC: G01R1/18 ; G01R31/28 ; G01R1/073 ; G01R1/067

Abstract:
A probe card includes a number probes. Each probe is adapted to contact a corresponding terminal of a circuit integrated in at least one die of a semiconductor material wafer during a test phase of the wafer. The probes include at least one probe adapted to provide and/or receive a radio frequency test signal to/from the corresponding terminal during the test phase. The probe card further includes at least one electromagnetic shield structure corresponding to the at least one probe adapted to provide and/or receive the radio frequency test signal for the at least partial shielding of an electromagnetic field irradiated by such at least one probe adapted to provide and/or receive the radio frequency test signal.
Public/Granted literature
- US20180100876A1 ELECTROMAGNETIC SHIELD FOR TESTING INTEGRATED CIRCUITS Public/Granted day:2018-04-12
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