Invention Grant
- Patent Title: Gate structures
-
Application No.: US16193960Application Date: 2018-11-16
-
Publication No.: US10685840B2Publication Date: 2020-06-16
- Inventor: Jiehui Shu , Hui Zang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/8234 ; H01L29/51 ; H01L29/78 ; H01L27/088 ; H01L21/28 ; H01L23/535 ; H01L29/49 ; H01L29/66

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to gate structures and methods of manufacture. The structure includes: a plurality of gate structures comprising a gate cap, sidewall spacers and source and drain regions; source and drain metallization features extending to the source and drain regions; and a liner extending along an upper portion of the sidewall spacers of at least one of the plurality of gate structures.
Public/Granted literature
- US20200161136A1 GATE STRUCTURES Public/Granted day:2020-05-21
Information query
IPC分类: