Invention Grant
- Patent Title: Vertical nanowires formed on upper fin surface
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Application No.: US15598905Application Date: 2017-05-18
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Publication No.: US10685847B2Publication Date: 2020-06-16
- Inventor: Steven Bentley , Richard A. Farrell , Gerard Schmid , Ajey Poovannummoottil Jacob
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/311 ; H01L29/78 ; H01L29/06 ; H01L21/308 ; B82Y10/00 ; B82Y40/00 ; H01L29/66 ; H01L29/775 ; H01L29/786 ; H01L21/8234
Abstract:
One illustrative device includes, among other things, at least one fin defined in a semiconductor substrate and a substantially vertical nanowire having an oval-shaped cross-section disposed on a top surface of the at least one fin.
Public/Granted literature
- US20170263465A1 VERTICAL NANOWIRES FORMED ON UPPER FIN SURFACE Public/Granted day:2017-09-14
Information query
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