Invention Grant
- Patent Title: MEMS component and production method for a MEMS component
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Application No.: US16041083Application Date: 2018-07-20
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Publication No.: US10689250B2Publication Date: 2020-06-23
- Inventor: Marc Fueldner , Stefan Barzen , Alfons Dehe , Gunar Lorenz
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@17bda68a
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H04R19/00 ; B81B3/00 ; H04R31/00 ; H04R19/04

Abstract:
In accordance with one exemplary embodiment, a production method for a double-membrane MEMS component comprises the following steps: providing a layer arrangement on a carrier substrate, wherein the layer arrangement has a first and second membrane structure spaced apart from one another and a counterelectrode structure arranged therebetween, wherein a sacrificial material is arranged in an intermediate region between the counterelectrode structure and the first and second membrane structures respectively spaced apart therefrom, and wherein the first membrane structure has an opening structure to the intermediate region with the sacrificial material and partly removing the sacrificial material from the intermediate region in order to obtain a mechanical connection structure comprising the sacrificial material between the first and second membrane structures, which mechanical connection structure is mechanically coupled between the first and second membrane structures and is mechanically decoupled from the counterelectrode structure.
Public/Granted literature
- US20190023562A1 MEMS COMPONENT AND PRODUCTION METHOD FOR A MEMS COMPONENT Public/Granted day:2019-01-24
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