Invention Grant
- Patent Title: Deposition platform for flexible substrates and method of operation thereof
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Application No.: US15351279Application Date: 2016-11-14
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Publication No.: US10689760B2Publication Date: 2020-06-23
- Inventor: Jose Manuel Dieguez-Campo , Heike Landgraf , Tobias Stolley , Stefan Hein , Florian Ries , Morrison Neil
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@481ef0c5
- Main IPC: C23C16/54
- IPC: C23C16/54 ; C23C16/44 ; C23C16/509 ; C23C16/455 ; C23C14/56

Abstract:
An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.
Public/Granted literature
- US20170058404A1 DEPOSITION PLATFORM FOR FLEXIBLE SUBSTRATES AND METHOD OF OPERATION THEREOF Public/Granted day:2017-03-02
Information query
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