Invention Grant
- Patent Title: III-V semiconductor waveguide nanoridge structure
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Application No.: US16228486Application Date: 2018-12-20
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Publication No.: US10690852B2Publication Date: 2020-06-23
- Inventor: Joris Van Campenhout , Ashwyn Srinivasan , Bernardette Kunert , Maria Ioanna Pantouvaki
- Applicant: IMEC vzw
- Applicant Address: BE Leuven BE Ghent
- Assignee: IMEC vzw,Universiteit Gent
- Current Assignee: IMEC vzw,Universiteit Gent
- Current Assignee Address: BE Leuven BE Ghent
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1096f598
- Main IPC: G02B6/13
- IPC: G02B6/13 ; G02F1/025 ; G02B6/12 ; G02F1/017

Abstract:
A III-V semiconductor waveguide nanoridge structure having a narrow supporting base with a freestanding wider body portion on top, is disclosed. In one aspect, the III-V waveguide includes a PIN diode. The waveguide comprises a III-V semiconductor waveguide core formed in the freestanding wider body portion; at least one heterojunction incorporated in the III-V semiconductor waveguide core; a bottom doped region of a first polarity positioned at a bottom of the narrow supporting base, forming a lower contact; and an upper doped region of a second polarity, forming an upper contact. The upper contact is positioned in at least one side wall of the freestanding wider body portion.
Public/Granted literature
- US20190219846A1 III-V SEMICONDUCTOR WAVEGUIDE NANORIDGE STRUCTURE Public/Granted day:2019-07-18
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