Invention Grant
- Patent Title: Methods and apparatus for multiple channel mass flow and ratio control systems
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Application No.: US15973190Application Date: 2018-05-07
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Publication No.: US10698426B2Publication Date: 2020-06-30
- Inventor: Junhua Ding , Michael L'Bassi , Wayne Cole
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G01F1/36 ; G01F1/50 ; G05B17/02

Abstract:
Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.
Public/Granted literature
- US20190339725A1 Methods and Apparatus for Multiple Channel Mass Flow and Ratio Control Systems Public/Granted day:2019-11-07
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