公开(公告)号：US20190339725A1

公开(公告)日：2019-11-07

申请号：US15973190

申请日：2018-05-07

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Wayne Cole

IPC: G05D7/06 ,  G01F1/36 ,  G01F1/50 ,  G05B17/02

Abstract: Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.

公开(公告)号：US10031004B2

公开(公告)日：2018-07-24

申请号：US15380682

申请日：2016-12-15

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Wayne Cole

IPC: G01F1/34

Abstract: A mass flow verifier (MFV) that is space-efficient and can verify flow rates for unknown fluids over a wide range of flow rates includes a chamber configured to receive a fluid, a critical flow nozzle connected to the chamber, and first and second pressure sensors that, respectively, detect fluid pressure in the chamber and upstream of the critical flow nozzle. A controller of the MFV is configured to verify flow rate of the fluid by, (i) at a first flow range, measuring a first flow rate based on a rate of rise in pressure of the fluid as detected by the first pressure sensor and determining a gas property function of the fluid based on pressures as detected by the first second pressure sensors, and (ii) at a second flow range, measuring a second flow rate based on pressure detected by the second pressure sensor and the determined gas property function.

公开(公告)号：US10698426B2

公开(公告)日：2020-06-30

申请号：US15973190

申请日：2018-05-07

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Wayne Cole

IPC: G05D7/06 ,  G01F1/36 ,  G01F1/50 ,  G05B17/02

Abstract: Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.

公开(公告)号：US20180172491A1

公开(公告)日：2018-06-21

申请号：US15380682

申请日：2016-12-15

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Wayne Cole

IPC: G01F1/34

CPC classification number: G01F1/34 ,  G01F15/005 ,  G01F25/0053 ,  G05D7/00

Abstract: A mass flow verifier (MFV) that is space-efficient and can verify flow rates for unknown fluids over a wide range of flow rates includes a chamber configured to receive a fluid, a critical flow nozzle connected to the chamber, and first and second pressure sensors that, respectively, detect fluid pressure in the chamber and upstream of the critical flow nozzle. A controller of the MFV is configured to verify flow rate of the fluid by, (i) at a first flow range, measuring a first flow rate based on a rate of rise in pressure of the fluid as detected by the first pressure sensor and determining a gas property function of the fluid based on pressures as detected by the first second pressure sensors, and (ii) at a second flow range, measuring a second flow rate based on pressure detected by the second pressure sensor and the determined gas property function.