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公开(公告)号：US20190339725A1
公开(公告)日：2019-11-07
申请号：US15973190
申请日：2018-05-07
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Wayne Cole
Abstract: Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.
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公开(公告)号：US20190243392A1
公开(公告)日：2019-08-08
申请号：US15887447
申请日：2018-02-02
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Gordon Hill
IPC: G05D7/06 , G01F1/36 , C23C16/52 , C23C16/455
CPC classification number: G05D7/0647 , C23C16/45525 , C23C16/52 , G01F1/36 , G01F1/363 , G01F15/005
Abstract: A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
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公开(公告)号：US10031004B2
公开(公告)日：2018-07-24
申请号：US15380682
申请日：2016-12-15
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Wayne Cole
IPC: G01F1/34
Abstract: A mass flow verifier (MFV) that is space-efficient and can verify flow rates for unknown fluids over a wide range of flow rates includes a chamber configured to receive a fluid, a critical flow nozzle connected to the chamber, and first and second pressure sensors that, respectively, detect fluid pressure in the chamber and upstream of the critical flow nozzle. A controller of the MFV is configured to verify flow rate of the fluid by, (i) at a first flow range, measuring a first flow rate based on a rate of rise in pressure of the fluid as detected by the first pressure sensor and determining a gas property function of the fluid based on pressures as detected by the first second pressure sensors, and (ii) at a second flow range, measuring a second flow rate based on pressure detected by the second pressure sensor and the determined gas property function.
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公开(公告)号：US10969799B2
公开(公告)日：2021-04-06
申请号：US16168812
申请日：2018-10-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
IPC: G05D7/06
Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
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公开(公告)号：US20200321225A1
公开(公告)日：2020-10-08
申请号：US16376861
申请日：2019-04-05
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: In a pulse gas delivery system, a chamber is pre-charged to a prescribed pressure through an upstream valve. Thereafter, a downstream control valve is opened to control flow of the gas during a gas pulse. A dedicated controller may control the downstream control valve in a feedback loop during the pulse based on pressure and temperature detected during the pulse.
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Patent Agency Ranking
公开(公告)号：US10725484B2
公开(公告)日：2020-07-28
申请号：US16124669
申请日：2018-09-07
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US11513542B2
公开(公告)日：2022-11-29
申请号：US16898016
申请日：2020-06-10
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
IPC: G05D7/06 , G01F1/36 , G01F15/00 , C23C16/455
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US20220161288A1
公开(公告)日：2022-05-26
申请号：US17455626
申请日：2021-11-18
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: Pulsed gas delivery is obtained with mass flow control using a thermal mass flow sensor and control valve. The controller is augmented for pressure control with a downstream pressure sensor. In separate control modes of operation, the control valve is controlled in response to the flow sensor during pulse gas delivery mode and controlled in response to the downstream pressure sensor during pressure control mode of operation.
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公开(公告)号：US20230304837A1
公开(公告)日：2023-09-28
申请号：US17656177
申请日：2022-03-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
CPC classification number: G01F1/42 , G01F1/86 , G05D7/0629
Abstract: Devices and methods for mass flow verification are provided. A mass flow verifier includes a chamber configured to receive a fluid, a critical flow nozzle upstream of the chamber, a chamber valve, a downstream valve, and a bypass valve. The chamber valve is configured to selectively enable fluid flow from the critical flow nozzle to the chamber. The downstream valve is configured to selectively enable fluid flow from the chamber to a downstream location. The bypass valve is configured to selectively enable fluid flow from the critical flow nozzle to a dump location. The mass flow verifier further includes a controller configured to verify flow rate of the fluid based on a rate of rise in pressure of the fluid as detected by a pressure sensor in the chamber.
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公开(公告)号：US20200241578A9
公开(公告)日：2020-07-30
申请号：US16124669
申请日：2018-09-07
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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