Invention Grant
- Patent Title: Quarter wave light splitting
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Application No.: US16509675Application Date: 2019-07-12
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Publication No.: US10705431B2Publication Date: 2020-07-07
- Inventor: Christopher Dennis Bencher , Joseph R. Johnson , David Markle , Mehdi Vaez-Iravani
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B27/28 ; G02B26/08 ; G02B5/30 ; G02F1/13

Abstract:
Embodiments of the present disclosure provide methods for producing images on substrates. The method includes providing a p-polarization beam to a first mirror cube having a first digital micromirror device (DMD), providing an s-polarization beam to a second mirror cube having a second DMD, and reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on the substrate.
Public/Granted literature
- US20190339622A1 QUARTER WAVE LIGHT SPLITTING Public/Granted day:2019-11-07
Information query
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