- Patent Title: Microwave generators and manufacture of synthetic diamond material
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Application No.: US15745751Application Date: 2016-08-22
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Publication No.: US10707062B2Publication Date: 2020-07-07
- Inventor: John Robert Brandon , Neil Perkins
- Applicant: ELEMENT SIX TECHNOLOGIES LIMITED
- Applicant Address: GB Didcot
- Assignee: Element Six Technologies Limited
- Current Assignee: Element Six Technologies Limited
- Current Assignee Address: GB Didcot
- Agency: Kilpatrick Townsend & Stockton LLP
- Agent Dean W. Russell; Clark F. Weight
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@34d3b218
- International Application: PCT/EP2016/069785 WO 20160822
- International Announcement: WO2017/032733 WO 20170302
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/27 ; C23C16/511 ; H01J37/244 ; H05H1/46

Abstract:
A microwave generator system for use in a microwave plasma enhanced chemical vapour deposition (MPECVD) system, the microwave generator system comprising: a microwave generator unit configured to produce microwaves at an operating power output suitable for fabricating synthetic diamond material via a chemical vapour deposition process; a fault detection system configured to detect a fault in the microwave generator unit which results in a reduction in the operating power output or a change in frequency; and a re-start system configured to restart the microwave generator unit in response to a fault being detected and recover the operating power output or frequency in a time period of less than 10 seconds after the fault in the microwave generator unit which caused the reduction in the operating power output or the change in frequency.
Public/Granted literature
- US20180218881A1 MICROWAVE GENERATORS AND MANUFACTURE OF SYNTHETIC DIAMOND MATERIAL Public/Granted day:2018-08-02
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