- 专利标题: Systems and methods for dicing samples using a bessel beam matrix
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申请号: US15911389申请日: 2018-03-05
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公开(公告)号: US10707130B2公开(公告)日: 2020-07-07
- 发明人: Shih-Chi Chen , Hiu Hung Lee , Dapeng Zhang , Erxuan Zhao , Yina Chang , Dihan Chen
- 申请人: The Chinese University of Hong Kong
- 申请人地址: CN Hong Kong
- 专利权人: The Chinese University of Hong Kong
- 当前专利权人: The Chinese University of Hong Kong
- 当前专利权人地址: CN Hong Kong
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 主分类号: B23K26/06
- IPC分类号: B23K26/06 ; B23K26/03 ; B23K26/067 ; B23K26/38 ; B23K26/0622 ; B23K26/04 ; B23K26/14 ; B23K26/08 ; H01L21/78 ; H01L21/268 ; H01L21/67
摘要:
Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.
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