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    Apparatus and method for laser beam shaping and scanning
    1.
    发明授权
    Apparatus and method for laser beam shaping and scanning 有权

    公开(公告)号：US10884250B2

    公开(公告)日：2021-01-05

    申请号：US16525245

    申请日：2019-07-29

    申请人： The Chinese University of Hong Kong

    发明人： Shih-Chi Chen ,  Qiang Geng ,  Dien Wang ,  Pengfei Chen ,  Dapeng Zhang

    IPC分类号： H04N7/18 ,  G02B27/09 ,  G02B26/08 ,  G03H1/00 ,  G02B21/00 ,  G02B27/00

    摘要： An apparatus and a method for laser beam shaping and scanning. The apparatus includes a digital micromirror device (DMD) including a plurality of micromirrors, configured to receive a first laser beam, adjust an axial position of a focal point of the first laser beam along a moving direction of the first laser beam by controlling a focal length of wavefront of a binary hologram applied to the DMD, and adjust a lateral position of the focal point on a plane perpendicular to the moving direction by controlling a tilted angle of a fringe pattern and a period of fringes of the binary hologram applied to the DMD, wherein the DMD simultaneously functions as programmable binary mask and a blazed grating.

    Parallel laser manufacturing system and method
    3.
    发明授权
    Parallel laser manufacturing system and method 有权

    公开(公告)号：US10207365B2

    公开(公告)日：2019-02-19

    申请号：US14594871

    申请日：2015-01-12

    申请人： The Chinese University of Hong Kong

    发明人： Shih-Chi Chen ,  Dapeng Zhang ,  Chenglin Gu ,  Jun Jiang ,  Yam Yeung

    IPC分类号： B23K26/00 ,  B23K26/06 ,  G02B26/08 ,  G02B27/28 ,  B23K26/0622

    摘要： A laser manufacturing system capable of fabricating 3-D resolved 2-D patterns. The system includes a pulse laser source generating a laser beam; a reflectance mirror arranged in the propagation path of the laser to reflect the laser, the mirror being controllable to adjust an emergent angle of the laser; a deformable dispersion unit located in the laser receiving path from the reflectance mirror and having an array of micromirrors controllable in response to the adjusted emergent angle to form required laser patterns from the reflected laser, the laser patterns having spatially separated optical spectral components with multiple propagation angles; and one or more focusing optical components positioned in the propagation path of the separated optical spectral components produced by the deformable dispersion unit; the focusing components recombine the optical spectral components at fabrication targets with patterns defined by the deformable dispersion unit. The laser pulse duration is shortest on or inside the fabrication target along the laser propagation path.

    METHOD AND APPARATUS FOR DYNAMIC-TUNING
    6.
    发明申请
    METHOD AND APPARATUS FOR DYNAMIC-TUNING 有权
    用于动态调节的方法和装置

    公开(公告)号：US20160133822A1

    公开(公告)日：2016-05-12

    申请号：US14535611

    申请日：2014-11-07

    申请人： The Chinese University of Hong Kong

    发明人： Shih-Chi Chen ,  Chenglin Li ,  Ji Wang

    IPC分类号： H01L41/053 ,  H01L41/09

    CPC分类号： B82Y40/00 ,  H02N2/0095 ,  H02N2/028

    摘要： A compliant apparatus for nano-manufacture, including a stage for supporting the objects to be nano-manufactured. The stage includes at least one flexural beam and at least one actuator coupled to the flexural beam; and the actuator is configured to generate and apply axial loads onto the flexural beam, such that a natural frequency of the flexural beam is shifted in response to the generated axial loads, so as to allow trade-offs between the natural frequency and a stroke of the stage for nano-manufacturing the objects.

    摘要翻译： 一种用于纳米制造的兼容装置，包括用于支撑要纳米制造的物体的台。 舞台包括至少一个弯曲梁和耦合到弯曲梁的至少一个致动器; 并且所述致动器被配置为产生并施加轴向负载到所述弯曲梁上，使得所述弯曲梁的固有频率响应于所产生的轴向载荷而偏移，以便允许所述自然频率和行程之间的权衡 纳米制造阶段的对象。