公开(公告)号：US10707130B2

公开(公告)日：2020-07-07

申请号：US15911389

申请日：2018-03-05

申请人： The Chinese University of Hong Kong

发明人： Shih-Chi Chen ,  Hiu Hung Lee ,  Dapeng Zhang ,  Erxuan Zhao ,  Yina Chang ,  Dihan Chen

IPC分类号： B23K26/06 ,  B23K26/03 ,  B23K26/067 ,  B23K26/38 ,  B23K26/0622 ,  B23K26/04 ,  B23K26/14 ,  B23K26/08 ,  H01L21/78 ,  H01L21/268 ,  H01L21/67

摘要： Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.

公开(公告)号：US20190273025A1

公开(公告)日：2019-09-05

申请号：US15911389

申请日：2018-03-05

申请人： The Chinese University of Hong Kong

发明人： Shih-Chi Chen ,  Hiu Hung Lee ,  Dapeng Zhang ,  Erxuan Zhao ,  Yina Chang ,  Dihan Chen

IPC分类号： H01L21/78 ,  H01L21/268 ,  H01L21/67 ,  B23K26/06 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/38 ,  B23K26/03

摘要： Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.