Invention Grant
- Patent Title: Metal protective layer for electron emitters with a diffusion barrier
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Application No.: US16419184Application Date: 2019-05-22
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Publication No.: US10714294B2Publication Date: 2020-07-14
- Inventor: Frances Hill , Gildardo R. Delgado , Rudy F. Garcia , Gary V. Lopez Lopez , Michael E. Romero , Katerina Ioakeimidi , Zefram Marks
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J1/16
- IPC: H01J1/16 ; H01J1/304 ; H01J37/073
Abstract:
An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
Public/Granted literature
- US20190362927A1 METAL PROTECTIVE LAYER FOR ELECTRON EMITTERS WITH A DIFFUSION BARRIER Public/Granted day:2019-11-28
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