- 专利标题: Photoelectric conversion device and method for manufacturing same
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申请号: US16560505申请日: 2019-09-04
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公开(公告)号: US10727360B2公开(公告)日: 2020-07-28
- 发明人: Katsunori Konishi , Kunta Yoshikawa , Hayato Kawasaki , Kunihiro Nakano
- 申请人: KANEKA CORPORATION
- 申请人地址: JP Osaka
- 专利权人: KANEKA CORPORATION
- 当前专利权人: KANEKA CORPORATION
- 当前专利权人地址: JP Osaka
- 代理机构: Osha Liang LLP
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4f6cbf7d
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/072 ; H01L31/0224 ; H01L31/0747
摘要:
A method for manufacturing a photoelectric conversion device, wherein the photoelectric conversion device includes a semiconductor substrate having a first conductivity-type region, a second conductivity-type region, and a boundary region on a first principal surface of a semiconductor substrate, the boundary region being in contact with and separating the first conductivity-type region and the second conductivity-type region, the method including: stacking a second conductivity-type semiconductor layer over the second conductivity-type region and the boundary region on the first principal surface of the semiconductor substrate; stacking an insulating layer over the second conductivity-type semiconductor layer in the boundary region; stacking a first conductivity-type semiconductor layer over the first conductivity-type region on the first principal surface of the semiconductor substrate and on the insulating layer; stacking an electrode layer on the first conductivity-type semiconductor layer and the second conductivity-type semiconductor layer; and forming a separation groove that separates the electrode layer.
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