Invention Grant
- Patent Title: Wraparound contact surrounding source/drain regions of integrated circuit structures and method of forming same
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Application No.: US16121014Application Date: 2018-09-04
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Publication No.: US10741656B2Publication Date: 2020-08-11
- Inventor: Hui Zang , Ruilong Xie , Shesh M. Pandey , Laertis Economikos
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/78 ; H01L29/66 ; H01L29/08 ; H01L21/3213

Abstract:
This disclosure is directed to an integrated circuit (IC) structure. The IC structure may include a semiconductor substrate having a first fin and a second fin spaced from the first fin; a first source/drain region in the first fin, the first source/drain region encompassing a top surface and two opposing lateral sides of the first fin; a second source/drain region in the second fin, the second source/drain encompassing a top surface and two opposing lateral sides of the second fin; and a metal contact extending over the first source/drain region and the second source/drain region and surrounding the top surface and at least a portion of the two opposing lateral sides of each of the first and the second source/drain regions.
Public/Granted literature
Information query
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