Invention Grant
- Patent Title: Thin film transistor having supporting layer, method for manufacturing the same and display device comprising the same
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Application No.: US16211151Application Date: 2018-12-05
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Publication No.: US10741697B2Publication Date: 2020-08-11
- Inventor: Jiyong Noh , Jaeman Jang , JuHeyuck Baeck , PilSang Yun
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Fenwick & West LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@38b5c0a2
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/24 ; H01L29/66 ; H01L21/02 ; H01L21/38 ; G02F1/1368 ; H01L27/32

Abstract:
A thin film transistor is provided. The thin film transistor includes an oxide semiconductor layer on a substrate, a gate electrode insulated from the oxide semiconductor layer to overlap at least a portion of the oxide semiconductor layer, a source electrode connected to the oxide semiconductor layer, and a drain electrode spaced apart from the source electrode and connected to the oxide semiconductor layer. The oxide semiconductor layer includes a first oxide semiconductor layer on the substrate and a second oxide semiconductor layer on the first oxide semiconductor layer, the first oxide semiconductor layer includes nitrogen of 1 at % to 5 at % concentration with respect to number of atoms, and the second oxide semiconductor layer has a nitrogen concentration which is lower than a nitrogen concentration of the first oxide semiconductor layer and a gradient of the nitrogen concentration such that the nitrogen concentration is lowered in a direction closer to the gate electrode.
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