Invention Grant
- Patent Title: Micromachined ultrasound transducer
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Application No.: US15664637Application Date: 2017-07-31
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Publication No.: US10751754B2Publication Date: 2020-08-25
- Inventor: Mohammad Hadi Motieian Najar , Peter Smeys
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/00 ; B06B1/06 ; A61B8/00 ; B06B1/02
Abstract:
A hybrid micromachined ultrasound transducer includes a piezoelectric micromachined transducer and a capacitive micromachined transducer. The capacitive micromachined transducer is vertically stacked with the piezoelectric micromachined transducer. The piezoelectric micromachined transducer and the capacitive micromachined transducer include a common shared electrode.
Public/Granted literature
- US20190030569A1 MICROMACHINED ULTRASOUND TRANSDUCER Public/Granted day:2019-01-31
Information query
IPC分类:
