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公开(公告)号:US20230311161A1
公开(公告)日:2023-10-05
申请号:US18206282
申请日:2023-06-06
Applicant: Texas Instruments Incorporated
Inventor: Mohammad Hadi Motieian Najar , Peter Smeys
CPC classification number: B06B1/0622 , B06B1/0215 , H10N30/87 , H10N30/88 , H10N30/1071
Abstract: A method includes receiving, by a piezoelectric stack of a transducer, a first piezoelectric voltage. The transducer has a base structure and a first layer, the base structure having a first displacement between a first portion of the base structure and the first layer. The method also includes transmitting, by the transducer, a first ultrasound frequency while receiving a first piezoelectric voltage, and receiving, by the transducer, a first bias voltage. The received first bias voltage alters the first displacement between the first portion of the base structure and the first layer, and the altered first displacement is smaller than the first displacement. The method further includes receiving, by the piezoelectric stack of the transducer, a second piezoelectric voltage to the transducer, and transmitting, by the transducer, a second ultrasound frequency while receiving the first bias voltage and the second piezoelectric voltage.
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公开(公告)号:US11251138B2
公开(公告)日:2022-02-15
申请号:US16717262
申请日:2019-12-17
Applicant: Texas Instruments Incorporated
Inventor: Scott Robert Summerfelt , Thomas Dyer Bonifield , Sreeram Subramanyam Nasum , Peter Smeys , Benjamin Stassen Cook
Abstract: In described examples of an integrated circuit (IC) there is a substrate of semiconductor material having a first region with a first transistor formed therein and a second region with a second transistor formed therein. An isolation trench extends through the substrate and separates the first region of the substrate from the second region of the substrate. An interconnect region having layers of dielectric is disposed on a top surface of the substrate. A dielectric polymer is disposed in the isolation trench and in a layer over the backside surface of the substrate. An edge of the polymer layer is separated from the perimeter edge of the substrate by a space.
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公开(公告)号:US10751754B2
公开(公告)日:2020-08-25
申请号:US15664637
申请日:2017-07-31
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Mohammad Hadi Motieian Najar , Peter Smeys
IPC: H01L41/047 , H01L41/00 , B06B1/06 , A61B8/00 , B06B1/02
Abstract: A hybrid micromachined ultrasound transducer includes a piezoelectric micromachined transducer and a capacitive micromachined transducer. The capacitive micromachined transducer is vertically stacked with the piezoelectric micromachined transducer. The piezoelectric micromachined transducer and the capacitive micromachined transducer include a common shared electrode.
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公开(公告)号:US20200043828A1
公开(公告)日:2020-02-06
申请号:US16055395
申请日:2018-08-06
Applicant: Texas Instruments Incorporated
Inventor: Peter Smeys , Ting-Ta Yen , Barry Jon Male , Paul Merle Emerson
IPC: H01L23/433 , H01L23/31 , H01L23/495 , H01L23/00
Abstract: Described examples include microelectronic devices and integrated circuits with an active first circuit in a first segment of a first wafer, a second circuit in a second segment of the first wafer, and second and third wafers bonded to different surfaces of the first wafer to provide first and second cavities with surfaces spaced from the first segment. An opening extends through the first wafer between the first and second cavities to separate portions of the first and second segments and to form a sealed cavity that surrounds the first segment. A bridge segment of the first wafer supports the first segment in the sealed cavity and includes one or more conductive structures to electrically connect the first and second circuits.
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公开(公告)号:US20190204269A1
公开(公告)日:2019-07-04
申请号:US15856490
申请日:2017-12-28
Applicant: Texas Instruments Incorporated
Inventor: Peter Smeys , Joyce Marie Mullenix
CPC classification number: G01N27/605 , G01D5/2006 , H01F17/0006 , H01F27/24
Abstract: Described examples include devices and methods for measuring relative humidity of an environment using inductance. The devices can include a resonant circuit, including a capacitor and an inductor. The inductor includes a moisture-absorbing core with at least a portion thereof exposed to an environment, with at least one magnetic property of the core being variable in response to changing levels of moisture in the environment. An excitation circuit provides an AC excitation signal to the resonant circuit. A sense circuit determines an inductance of the inductor according to a sense signal from the resonant circuit. The sense circuit is coupled to generate an output signal that indicates a humidity level of the environment according to the sense signal.
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公开(公告)号:US11264970B2
公开(公告)日:2022-03-01
申请号:US16290873
申请日:2019-03-02
Applicant: Texas Instruments Incorporated
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
Abstract: A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.
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公开(公告)号:US20200373908A1
公开(公告)日:2020-11-26
申请号:US16422494
申请日:2019-05-24
Applicant: Texas Instruments Incorporated
Inventor: Ting-Ta Yen , Jeronimo Segovia Fernandez , Bichoy Bahr , Peter Smeys
Abstract: A micromechanical system (MEMS) resonator includes a base substrate. A piezoelectric layer has a first electrode attached to a first surface of the piezoelectric layer and a second electrode attached to a second surface of the piezoelectric layer opposite the first electrode. The first electrode is bounded by a perimeter edge. A patterned acoustic mirror is formed on a top surface of the first electrode opposite the piezoelectric layer, such that the patterned acoustic mirror covers a border strip of the top surface of the first electrode at the perimeter edge and does not cover an active portion of the top surface of the first electrode.
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公开(公告)号:US20200350889A1
公开(公告)日:2020-11-05
申请号:US16752956
申请日:2020-01-27
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Peter Smeys , Ting-Ta Yen
Abstract: A method for manufacturing a Bulk Acoustic Wave (BAW) resonator module is provided. The method includes providing a substrate, defining a platform region on the surface of the substrate, disposing a BAW resonator device on the surface of the substrate within the platform region, and etching an isolation trench circumscribing at least 50% of a circumference of the platform region.
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公开(公告)号:US20200280300A1
公开(公告)日:2020-09-03
申请号:US16290873
申请日:2019-03-02
Applicant: Texas Instruments Incorporated
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
Abstract: A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.
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公开(公告)号:US10727815B2
公开(公告)日:2020-07-28
申请号:US16446007
申请日:2019-06-19
Applicant: Texas Instruments Incorporated
Inventor: Jeronimo Segovia Fernandez , Peter Smeys , Ali Djabbari
Abstract: Methods, apparatus, systems and articles of manufacture are disclosed to measure a resonant sensor based on detection of group delay. An example apparatus includes a modulation manager configured to query the resonant sensor with a modulated signal including a frequency; and a resonance determiner configured to determine a resonance frequency of the resonant sensor based on a group delay associated with the resonant sensor and the frequency.
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