Invention Grant
- Patent Title: Stacked nanosheet technology with uniform Vth control
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Application No.: US16188993Application Date: 2018-11-13
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Publication No.: US10756176B2Publication Date: 2020-08-25
- Inventor: Pouya Hashemi , Takashi Ando , Jingyun Zhang , Choonghyun Lee , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Yee & Associates, P.C.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/66 ; H01L29/49 ; H01L21/02 ; H01L29/786 ; H01L21/28 ; H01L29/423

Abstract:
A stacked nanosheet semiconductor device and method of forming are provided. In an illustrative embodiment, a gate all around (GAA) stacked nanosheet field effect transistor (FET) includes a plurality of stacked semiconductor channel nanosheet layers and a dummy nanosheet layer formed above a top one of the stacked semiconductor channel nanosheet layers, the dummy nanosheet formed from a dielectric material. The GAA stacked nanosheet FET also includes a high dielectric constant (high-k) material formed around each of the plurality of stacked semiconductor channel nanosheet layers and around the dummy nanosheet layer and a first work function (WF) metal formed around the plurality of stacked semiconductor channel nanosheet layers and the dummy nanosheet layer.
Public/Granted literature
- US20200152737A1 STACKED NANOSHEET TECHNOLOGY WITH UNIFORM VTH CONTROL Public/Granted day:2020-05-14
Information query
IPC分类: