Invention Grant
- Patent Title: MEMS sensor with dual pendulous proof masses
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Application No.: US15721643Application Date: 2017-09-29
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Publication No.: US10759656B2Publication Date: 2020-09-01
- Inventor: Christopher C. Painter , Te Hsi Lee
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Fish & Richardson P.C.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08 ; B81B3/00

Abstract:
A MEMS sensor is disclosed that includes dual pendulous proof masses comprised of sections of different thickness to allow simultaneous suppression of vertical and lateral thermal gradient-induced offsets in a MEMS sensor while still allowing for the normal operation of the accelerometer. In an embodiment, the structure and different sections of the MEMS sensor is realized using multiple polysilicon layers. In other embodiments, the structure and different thickness sections may be realized with other materials and processes. For example, plating, etching, or silicon-on-nothing (SON) processing.
Public/Granted literature
- US20190100426A1 MEMS SENSOR WITH DUAL PENDULOUS PROOF MASSES Public/Granted day:2019-04-04
Information query
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