Invention Grant
- Patent Title: Laminated heater with different heater trace materials
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Application No.: US15586178Application Date: 2017-05-03
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Publication No.: US10764966B2Publication Date: 2020-09-01
- Inventor: Yuma Ohkura , Darrell Ehrlich , Eric A. Pape
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H05B3/03
- IPC: H05B3/03 ; H05B3/06 ; H05B3/28 ; H05K1/11 ; H05K3/10 ; H05B3/26

Abstract:
A substrate support for a substrate processing system includes a plurality of heating zones, a baseplate, at least one of a heating layer and a ceramic layer arranged on the baseplate, and a plurality of heating elements provided within the at least one of the heating layer and the ceramic layer. The plurality of heating elements includes a first material having a first electrical resistance. Wiring is provided through the baseplate in a first zone of the plurality of heating zones. An electrical connection is routed from the wiring in the first zone to a first heating element of the plurality of heating elements. The first heating element is arranged in a second zone of the plurality of heating zones and the electrical connection includes a second material having a second electrical resistance that is less than the first electrical resistance.
Public/Granted literature
- US20170332480A1 LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS Public/Granted day:2017-11-16
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