Invention Grant
- Patent Title: Generating high resolution images from low resolution images for semiconductor applications
-
Application No.: US16019422Application Date: 2018-06-26
-
Publication No.: US10769761B2Publication Date: 2020-09-08
- Inventor: Saurabh Sharma , Amitoz Singh Dandiana , Mohan Mahadevan , Chao Fang , Amir Azordegan , Brian Duffy
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@54d91369
- Main IPC: G06T5/00
- IPC: G06T5/00 ; G06T3/40

Abstract:
Methods and systems for generating a high resolution image for a specimen from a low resolution image of the specimen are provided. One system includes one or more computer subsystems configured for acquiring a low resolution image of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a deep convolutional neural network that includes one or more first layers configured for generating a representation of the low resolution image. The deep convolutional neural network also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the low resolution image. The second layer(s) include a final layer configured to output the high resolution image and configured as a sub-pixel convolutional layer.
Public/Granted literature
- US20190005629A1 GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SEMICONDUCTOR APPLICATIONS Public/Granted day:2019-01-03
Information query