Invention Grant
- Patent Title: Water level sequencing flow cell fabrication
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Application No.: US16128120Application Date: 2018-09-11
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Publication No.: US10784103B2Publication Date: 2020-09-22
- Inventor: Shifeng Li , Jian Gong , Yan-You Lin , Cheng Frank Zhong
- Applicant: Complete Genomics, Inc.
- Applicant Address: CN Shenzhen
- Assignee: MGI TECH CO., LTD.
- Current Assignee: MGI TECH CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/20 ; H01L21/28 ; G01N21/64 ; G01N21/05 ; G01N33/487 ; B01L3/00

Abstract:
A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.
Public/Granted literature
- US20190088463A1 WAFER LEVEL SEQUENCING FLOW CELL FABRICATION Public/Granted day:2019-03-21
Information query
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