公开(公告)号：US20190088463A1

公开(公告)日：2019-03-21

申请号：US16128120

申请日：2018-09-11

Applicant: Complete Genomics, Inc.

Inventor： Shifeng Li ,  Jian Gong ,  Yan-You Lin ,  Cheng Frank Zhong

IPC: H01L21/02 ,  H01L21/28 ,  H01L29/20

Abstract: A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.

公开(公告)号：US10784103B2

公开(公告)日：2020-09-22

申请号：US16128120

申请日：2018-09-11

Applicant: Complete Genomics, Inc.

Inventor： Shifeng Li ,  Jian Gong ,  Yan-You Lin ,  Cheng Frank Zhong

IPC: H01L21/02 ,  H01L29/20 ,  H01L21/28 ,  G01N21/64 ,  G01N21/05 ,  G01N33/487 ,  B01L3/00

Abstract: A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.

公开(公告)号：US20190070606A1

公开(公告)日：2019-03-07

申请号：US16119450

申请日：2018-08-31

Applicant: Complete Genomics, Inc.

Inventor： Chen Li ,  Cheng Frank Zhong ,  Yu Liu ,  Yiwen Ouyang

IPC: B01L3/00

Abstract: A microfluidic device includes a substrate, a sensor, and one or more lamination films. The top surface of the substrate can include first recessed grooves forming first open channels and the bottom surface of the plastic substrate can include a first recessed cavity and second recessed groves forming second open channels. A first lamination film can be adhered with the top surface of the plastic substrate to form first closed channels. A second lamination film can be adhered to the bottom surface of the plastic substrate to form second closed channels. The sensor can be on the bottom surface of the substrate such that it overlies the first recessed cavity to form a flow cell with the sensor top surface inward facing. A first closed channel can be fluidically connected with a second closed channel and a first or second closed channel can be fluidically connected with the flow cell.

公开(公告)号：US20180155782A1

公开(公告)日：2018-06-07

申请号：US15803077

申请日：2017-11-03

Applicant: Complete Genomics, Inc.

Inventor： Cheng Frank Zhong

IPC: C12Q1/6874 ,  H01L27/146

CPC classification number: C12Q1/6874 ,  G01N21/645 ,  G01N21/76 ,  G01N2021/6471 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14645 ,  H01L27/14685

Abstract: Embodiments of the invention provide an improved biosensor for biological or chemical analysis. According to embodiments of the invention, backside illumination (BSI) complementary metal-oxide-semiconductor (CMOS) image sensors can be used to effectively analyze and measure fluorescence or chemiluminescence of a sample. This measured value can be used to help identify a sample. Embodiments of the invention also provide methods of manufacturing an improved biosensor for biological or chemical analysis and systems and methods of DNA sequencing.