公开(公告)号：US10784103B2

公开(公告)日：2020-09-22

申请号：US16128120

申请日：2018-09-11

Applicant: Complete Genomics, Inc.

Inventor： Shifeng Li ,  Jian Gong ,  Yan-You Lin ,  Cheng Frank Zhong

IPC: H01L21/02 ,  H01L29/20 ,  H01L21/28 ,  G01N21/64 ,  G01N21/05 ,  G01N33/487 ,  B01L3/00

Abstract: A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.

公开(公告)号：US20190088463A1

公开(公告)日：2019-03-21

申请号：US16128120

申请日：2018-09-11

Applicant: Complete Genomics, Inc.

Inventor： Shifeng Li ,  Jian Gong ,  Yan-You Lin ,  Cheng Frank Zhong

IPC: H01L21/02 ,  H01L21/28 ,  H01L29/20

Abstract: A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.