Invention Grant
- Patent Title: Semiconductor memory devices
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Application No.: US16027887Application Date: 2018-07-05
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Publication No.: US10784272B2Publication Date: 2020-09-22
- Inventor: Kiseok Lee , Junsoo Kim , Hui-Jung Kim , Bong-Soo Kim , Satoru Yamada , Kyupil Lee , Sunghee Han , HyeongSun Hong , Yoosang Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4472a764
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L23/532 ; G11C7/18 ; H01L49/02 ; G11C8/14 ; H01L27/11524 ; G11C11/404 ; G11C11/4097

Abstract:
A semiconductor memory device comprises a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also comprises a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer comprises semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.
Public/Granted literature
- US20190164985A1 SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2019-05-30
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