Invention Grant
- Patent Title: Integrated electronic device with a redistribution region and a high resilience to mechanical stresses and method for its preparation
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Application No.: US16044186Application Date: 2018-07-24
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Publication No.: US10790226B2Publication Date: 2020-09-29
- Inventor: Francesco Maria Pipia , Ivan Venegoni , Annamaria Votta , Francesca Milanesi , Samuele Sciarrillo , Paolo Colpani
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@44dacc7c
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/532 ; H01L23/528 ; H01L23/525

Abstract:
An integrated electronic device includes a semiconductor body and a passivation structure including a frontal dielectric layer bounded by a frontal surface. A conductive region forms a via region, extending into a hole through the frontal dielectric layer. An overlaid redistribution region extends over the frontal surface. A barrier structure includes at least a first barrier region extending into the hole and surrounding the via region. The first barrier region extends over the frontal surface. A first coating layer covers the top and the sides of the redistribution region and a second coating layer covers the first coating layer. A cavity extends between the redistribution region and the frontal surface and is bounded on one side by the first coating layer and on the other by the barrier structure.
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