Invention Grant
- Patent Title: 3D NAND with integral drain-end select gate (SGD)
-
Application No.: US15721224Application Date: 2017-09-29
-
Publication No.: US10790290B2Publication Date: 2020-09-29
- Inventor: David A. Daycock , Purnima Narayanan , John Hopkins , Guoxing Duan , Barbara L. Casey , Christopher J. Larsen , Meng-Wei Kuo , Qian Tao
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Compass IP Law PC
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/1157 ; H01L21/8234 ; H01L27/11582 ; H01L27/11556

Abstract:
A 3D NAND storage device includes a plurality of layers containing doped semiconductor material interleaved with a plurality of layers of dielectric material. Each of the pillars forming the 3D NAND storage device includes a plurality of memory cells and a drain-end select gate (SGD). The pillars are separated by a hollow channel in which a plurality of film layers, including at least a lower film layer and an upper film layer have been deposited. The systems and methods described herein remove at least the upper film layer proximate the SGD while maintaining the film layers proximate the memory cells. Such an arrangement beneficially permits tailoring the film layers proximate the SGD prior to depositing the channel film layer in the hollow channel. The systems and methods described herein permit the deposition of a continuous channel film layer proximate both the memory cells and the SGD.
Public/Granted literature
- US20190103410A1 3D NAND WITH INTEGRAL DRAIN-END SELECT GATE (SGD) Public/Granted day:2019-04-04
Information query
IPC分类: