Invention Grant
- Patent Title: Sensor device with integrated calibration system and calibration method
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Application No.: US16049262Application Date: 2018-07-30
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Publication No.: US10794738B2Publication Date: 2020-10-06
- Inventor: Dario Paci , Francesco Procopio , Carlo Valzasina , Paolo Angelini , Francesco Diazzi , Roberto Pio Baorda , Danilo Karim Kaddouri
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5a3beedd
- Main IPC: G01K15/00
- IPC: G01K15/00 ; G01D18/00 ; G01K13/00 ; H05B3/16 ; B81C99/00 ; G01R33/00 ; G01R33/09

Abstract:
An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.
Public/Granted literature
- US20180335326A1 SENSOR DEVICE WITH INTEGRATED CALIBRATION SYSTEM AND CALIBRATION METHOD Public/Granted day:2018-11-22
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